Detail
Product name: Electronic grade hydrofluoric acid /HF
Application: Mainly used in IC industry for chip cleaning and corrosion, is essential part in micro electronic technique; also applied in liquid crystal display (TFT-LCD) industry, used for glass substrate, silicon dioxide, silicon dioxide Etching; also used for solar cell industry, silicon surface cleaning, etching.
Packaging specification: 1000L IBC tank container ;
Storage: Avoid the impact during transportation, to prevent direct sunlight, stored in a cool, ventilated warehouse, keep the container sealed.
Physical property: colorless transparent liquid, weak acid, strong irritating odor, strong corrosion. The density of 50% hydrofluoric acid is 1.157g / ml, the atmospheric pressure is 107 ℃, freezing point is -46.3 ℃, room temperature specific heat is 3.1J / g. ℃, @18 ℃, the equivalent conductivity is 17.32Ω- 1cm-1. Can react with metal salt, oxide and hydroxide salt and erode glass, silicate to generate SIF4 gas.
Specification:
| Grade |
UP-S |
UP |
EL |
|
|
ITEM |
UNIT |
Index |
Index |
Index |
|
ASSAY |
% |
49%±0.5 |
49%±0.5 |
49%±0.5 |
|
H2SIF6 |
mg/l |
≤100 |
≤100 |
≤100 |
|
CL |
mg/l |
≤5 |
≤5 |
≤5 |
|
NO3 |
mg/l |
≤3 |
≤3 |
≤3 |
|
PO4 |
mg/l |
≤1 |
≤1 |
≤1 |
|
Sulfate and sulfite |
mg/l |
≤5 |
≤5 |
≤5 |
|
COLOR |
HAZEN |
≤10 |
≤10 |
≤10 |
|
Particle (≥1.0μm) |
Ea/ml |
≤10 |
≤10 |
≤25 |
|
Li |
PPB |
≤1 |
≤10 |
≤20 |
|
Na |
PPB |
≤1 |
≤10 |
≤100 |
|
Mg |
PPB |
≤1 |
≤10 |
≤100 |
|
Al |
PPB |
≤1 |
≤10 |
≤100 |
|
K |
PPB |
≤1 |
≤10 |
≤100 |
|
Ca |
PPB |
≤1 |
≤10 |
≤100 |
|
Cr |
PPB |
≤1 |
≤10 |
≤20 |
|
Fe |
PPB |
≤1 |
≤10 |
≤100 |
|
Co |
PPB |
≤1 |
≤10 |
≤20 |
|
Ni |
PPB |
≤1 |
≤10 |
≤50 |
|
Cu |
PPB |
≤1 |
≤10 |
≤20 |
|
Zn |
PPB |
≤1 |
≤10 |
≤50 |
|
Ga |
PPB |
≤1 |
≤10 |
≤20 |
|
Mo |
PPB |
≤1 |
≤10 |
≤100 |
|
Ag |
PPB |
≤1 |
≤10 |
≤20 |
|
Cd |
PPB |
≤1 |
≤10 |
≤50 |
|
Sn |
PPB |
≤1 |
≤10 |
≤20 |
|
Ba |
PPB |
≤1 |
≤10 |
≤100 |
|
Pt |
PPB |
≤1 |
≤10 |
≤100 |
|
Au |
PPB |
≤1 |
≤10 |
≤20 |
|
Mn |
PPB |
≤1 |
≤10 |
≤20 |
|
Pb |
PPB |
≤1 |
≤10 |
≤50 |
|
Ti |
PPB |
≤1 |
≤10 |
≤10 |
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